儀器設備EQUIPMENT

 

鍍膜設備  
E-Beam Gun Evaporation System  (電子槍蒸鍍機) Dual E-Beam Gun Evaporation System (雙電子槍蒸鍍機)
Magnetron Sputter (磁控濺鍍機) Ion Beam Sputtering Deposition System (離子束濺鍍機)
Spin Coater (旋轉塗佈鍍膜機)           RF Ion Beam Sputtering Deposition System
量測設備  
FE-SE EDS
AFM U-4150
拉曼光譜儀(暫不接受委託) XRD
霍爾量測儀 FTIR(暫不接受委託)
Alpha-step OM
CA 四點探針

 

 

鍍膜設備

*E-Beam Gun Evaporation System  (電子槍蒸鍍機)↓

 

*Dual E-Beam Gun Evaporation System (雙電子槍蒸鍍機)↓

 

*Magnetron Sputter (磁控濺鍍機)↓

 

 

 

* Ion Beam Sputtering Deposition System (離子束濺鍍機)

 

 

* RF Ion Beam Sputtering Deposition System (射頻離子束濺鍍機)↓

 

* Spin Coater (旋轉塗佈鍍膜機) 

 

量測設備